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題 名 | 高科技廠房微振量測之理論與分析 |
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作 者 | 鍾立來; 王彥博; 李建良; | 書刊名 | 結構工程 |
卷 期 | 18:2=70 2003.06[民92.06] |
頁 次 | 頁49-72 |
分類號 | 441.3 |
關鍵詞 | 高科技廠房; 微振量測; |
語 文 | 中文(Chinese) |
中文摘要 | 隨著半導體製程技術的進步,元件特徵尺寸朝向細微化,使得晶圓生產作業環境之要求較已往更為嚴苛,特別是微振動問題。有鑑於此,本文詳盡介紹微振動問題。有鑑於此,本文詳盡介紹微振動量測之理論與分析,利用商用軟體,撰寫簡易計算程式,即可完成徵振動訊號之分析。從三分之一倍頻的定義及性質,說明頻率寬帶之劃分及上下界頻率與中心頻率之關係。進而分別推導直接法及間接法,以求取三分之一倍頻寬帶內之均方根振動量。由於數位化之量測乃大勢之所趨,遂提出在離散時間域相對應之分析方法,並將振動量之均方根值表示為分貝值,以與振動規格比較。最後,以高科技廠房格子梁樓板現地微振動量測為例,說明直接法與間接法之分析流程,無論以直接法或間接法進行微振動分析,所求取的速度三分之一倍頻均方根振動量,結果均相當一致;惟間接法係以整體微振動訊號進行分析,無須分段,頻率之解析度高,精確度亦隨之提高,但須同時處理整體訊號,數據較多,計算量亦隨之提高。 |
英文摘要 | Optical multistage interconnection networks (OMINs), based on 2×2 directional coupler photonic switches, are an essential approach for all-optical lightwave networks. OMINs have been proposed as the routing component in IP over DWDM architecture in all-optical high-performance networks. Network dilation is a space domain approach is to reduce the negative effect of optical crosstalk. In this paper, we focus on the two dilated blocking networks concatenated dilated re-arrangeable networks, such as N×N dilated_blocking_network_dilated_blocking_network architectures. We propose and evaluate the performance of a class of isomorphic networks of the N×N Dilated_Baseline_Network-Dilated_Baseline_Network-1(DBN-DBN-1) architecture based on a three-stage Clos network and the Slepian-Duguid Theorem. Topological equivalence is to prove the isomorphic networks are non-blocking dilated re-arrangeable networks. Two types of center-stage connection between dilated blocking networks are summarized: straight and skewed straight. The general routing algorithm is also developed. |
本系統中英文摘要資訊取自各篇刊載內容。