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題 名 | 以電漿濺鍍技術備製太陽能選擇性吸收膜及其性能之研究=The Performance of Solar Selective Thin Film Prepared by Plasma Sputtering |
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作 者 | 陶惟翰; 楊正旭; 林永森; 詹文皓; 唐震宸; | 書刊名 | 華岡工程學報 |
卷 期 | 17 2003.06[民92.06] |
頁 次 | 頁133-146 |
分類號 | 400.15 |
關鍵詞 | 太陽能選擇性吸收膜; 吸收率; 放射率; 電漿濺鍍; 光學模擬; Solar selective-absorber; Absorptance; Emittance; Plasma sputtering; Numerical optical model; |
語 文 | 中文(Chinese) |
中文摘要 | 本計劃研究多層膜光學理論並撰寫電腦程式以模擬多層膜於太陽光輻射範圍的反射率,使所製備的太陽能選擇性吸收膜對太陽輻射具有良好之吸收性,同時只放射少量的紅外線幅射。薄膜的光學性質採用FB model搭配曲線擬合技巧,即可利用所量測的薄膜反射率或穿透率同時迴歸並得到薄膜厚度與折射率。太陽能選擇性吸收膜採用直流與交流共濺鍍技術製備,薄膜材料為鋁與氮化鋁的陶瓷金屬合金,當薄膜的陶瓷與金屬比例不同時,可得到漸變不同的折射率,將FB model迴歸的薄膜光學性質搭配多層膜光學理論可得到高效率太陽能選擇性吸收膜結構。然而,太陽能選擇性吸收膜可達到的最高溫度,則由太陽能選擇性吸收膜對太陽光之吸收率α及其紅外線放射率ε的比例而決定,本研究製備吸收率最高的吸收膜為多層漸變式陶瓷金屬合金吸收膜,其吸收率為0.96,放射率為0.04,吸收率(α)/放射率(ε)=24;效率最高的吸收膜為4層漸變式陶瓷金屬合金吸收膜,其吸收率為0.943,放射率為0.03,吸收率(α)/放射率(ε)=31.4。 本研究亦製備單層加熱式吸收膜,製備之薄膜使用歐傑光譜分析表面元素縱深分佈,吸收膜加熱處理後的吸收率由0.76提升至0.88;放射率由0.1降低至0.03;吸收率(α)/放射率(ε)比值可達29.3。 |
英文摘要 | We studied the optical theory of multi-layer coatings and simulated the reflectance of the multi-layer coatings. The solar selective surface we studied featured high absorption of solar radiation and low emittance of infrared rays. The optical property and film thickness of thin film can be obtained by taking the transmittance or relflectance of the films, and applied the FB model in the regression process. Solar selective surfaces composed of A1 and A1N were fabricated by DC of RF sputtering technique. Graded refractive index of the A1-A1N composite can be obtained by tuning the volume fraction of metal. The structure of solar selective surface with high solar absorptance can be simulated by the program of optical design and FB model. However, the maximum temperature that the solar selective surface can achieve depends on the ratio of solar absorptance and emittance. In this study, the surface with multi-layer cermet coatings can lead to a very high absorptance of 0.96, an emittance of 0.04, and the ratio of α/ε is 24. The surface with four cermet coatings can lead to an absorptance of 0.94 and a very low emittance of 0.03, which has the highest ratio ofα/ε,31.4. In this study, we also coated a single cermet layer as solar selective surface. The efficiency of the Film can be improved by heat treatment. The absorptance and emittance of the heated film are 0.88 and 0.03 respectively, and the ratio ofα/ε can be achieved as high as 29.3 just by a single coating. |
本系統中英文摘要資訊取自各篇刊載內容。