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題名 | 微結構製造與分析=Fabrication and Analysis of Microstructure |
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作者姓名(中文) | 廖顯大; 李勝華; 陳育堂; | 書刊名 | 德霖學報. 理工類 |
卷期 | 16 2002.06[民91.06] |
頁次 | 頁32-41 |
分類號 | 448.57 |
關鍵詞 | 面形微加工技術; 懸臂樑; 空橋; 圓形薄膜空室; 重鉻酸明膠; 光阻; Surface micromachining techniques; Cantilever beam; Air bridge; Circular diaphragm chamber; Dichromated delatine; Photoresist; |
語文 | 中文(Chinese) |
中文摘要 | 本文提供以面形微加工技術(surface micromachining)製造設計三種微結構:懸臂樑(cantilever beam)、空橋(air bridge)、圓形薄膜空室(circular diaphragm,chamber)。以(100)矽晶(silicon wafer)基材,並以鋁(Al)為結構層,以重鉻酸明膠(DCG,dichromated delatine)和光阻(photoresist)為犧牲層。製造出第一共振頻率為1KHz的懸臂樑與空橋,其膜厚(h)、長度(L)分別為1μm、904μm與0.77μm、2000μm。圓形薄膜空室在達降伏應力且中央的最大變形為10μm時得膜厚與半徑則為1μm與488μm。期能以此為基礎作為日後設計各種微結構的參考。 |
英文摘要 | This paper introduces three micostructures from the surface micromachining techniques: cantilever beam, air bridge and circular diaphragm chamber, which were formulated with dichromated delatine (DCG) and photoresist on the aluminum silicon walfer based structure. An 1KHz nature frequency cantilever beam and air bridge were manufactured with the thickness (h) and length (L) of 1μm, 904μm and 0.77μm, 2000μm, respectively. The circular diaphragm chamber was manufactured with the maximum center deformation of 10μm, thickness of 1μm and radius of 488μm. The results showed good applications in the field of designing various microstructures. |
本系統之摘要資訊系依該期刊論文摘要之資訊為主。