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題 名 | 拋物面鏡橢偏儀--生醫與奈米科技應用初探=Parabolic Ellipsometer: Attempt to Biomedical and Nanotechnology Applications |
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作 者 | 吳俊彥; 李世光; | 書刊名 | 光學工程 |
卷 期 | 76 2001.12[民90.12] |
頁 次 | 頁5-25 |
分類號 | 471.7 |
關鍵詞 | 橢偏術; 橢偏儀; 生物晶片; 蛋白質晶片; Ellipsometry; Ellipsometer; Biochip; Protein-chip; |
語 文 | 中文(Chinese) |
中文摘要 | 本文成功建構完成一套拋物面鏡式變入射角相位調制橢偏儀檢測系統,並以此系統從事薄膜量測與生物樣本量測來驗證其功能與適用領域;此一命名為Opto-BioMorphin的創新光學測系統,簡稱OBMorph,具應用於生物醫學的研究領域之潛力。由於此OBMorph檢測系統為可變入射角式橢偏儀,因此能進行多層薄膜光學參數之求取,所以在生物醫學的研究領域,包今病原或抗體檢測、液固態介面的生物體動態結合分析、與表面濃度量測等領域上均可有極大之助益。除此之外,此一創新檢測系統亦為生醫晶片之研發及生產生醫晶片載具的研發及製造等應用的重要工具。本文所完成之OBMorph檢測系統中,採用控制精度達0.μm之伺服馬達來控制五角稜鏡之位置,將其配合以鑽石加工製作完成的拋物及半球反射面鏡以共同形成創新變入射角機構,�謆茖t統之入射角控制精度因此可達± 0.001°。本系統之另一創新設計為採用向列型液晶來做為相位調制元件;為求達到最高的量測精度,OBMorph檢測系統亦內建液晶相位即時量測系統。經由所得實驗數據與理論值之整體契合,本文成功的驗證了創新之橢偏儀架構OBMorph系統之可行性與廣泛的應用範圍,實驗所用生物樣本量測之良好結果, 亦成功的驗證了本OBMorph系統在生醫檢測上之潛力與將來可能之正面衝擊。 |
英文摘要 | In this paper, an innovative ellipsometer based biosensor named OBMorph, was designed to analyze biomolecular interaction on a protein biochip. OBMorph is an acronym of Opto-BioMorphin, which was named to imply the morph capabilities of this newly developed instrument. Both the theory, optical and opto-mechanical configurations of this newly developed ellipsometer and methodologies adopted in system design to improve the system performance are presented. This OBMorph system has ability to calculate the variation of concentration of biochemical reactions by measuring the ellipsometric parameters. In addition, the thickness and concentration of the multi-layered sample can be resolved by using this variable angle ellipsometry. It is believed that the newly developed OBMorph system is able to undertake an accurate measurement on biomedical interaction. To achieve high precision system goal, a novel variable-incdent-angle control opto-mechanism was designed and implemented. A pair of paraboloidal reflective mirror and a spherical reflective mirror, which was machined to ultra-high precision, was adopted to control the incident light beam. By using a 0.4 μm accuracy servomotor to carry a penta prism, a ± 0.001° angular control accuracy can be achieved. As the experimental results and the simulation data agree well with each other, it is proved that the newly developed OBMorph system has great potential to explore various biomolecular behaviors. |
本系統中英文摘要資訊取自各篇刊載內容。