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題 名 | 螺旋型乾式真空幫浦雛型機之設計開發=Study on the Prototype Development of Screw Dry Vacuum Pump |
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作 者 | 陳峰志; 周榮源; 林進祥; | 書刊名 | 真空科技 |
卷 期 | 11:3/4 民87.12 |
頁 次 | 頁11-26 |
分類號 | 446.74 |
關鍵詞 | 乾式真空幫浦; 雛型機; Screw dry vacuum pump; |
語 文 | 中文(Chinese) |
中文摘要 | 國科會精密儀器發展中心投入真空幫浦之研究發展,以逆向工程研究為策略,旨 在建立自主之工程技術、檢測與設計分析能力,並進而開發次世代新型幫浦。乾式真空幫浦 逆向工程包括元件量測、工程圖繪製、元件發包試製、係統組裝及性能測試。乾式真空幫浦 顧名思義是在幫浦進氣、壓縮及排氣行程中,轉子運動所掃掠過的行程中並不需油脂來潤滑 或密封,正因為如此,這一類幫浦可避免油氣回流對系統造成污染,並且影響系統的真空度。 本研究逆向工程以單級螺旋式真空幫浦為載具,螺旋式幫浦是由二個螺紋方向相反的螺旋轉 子,在轉子運轉時達成進氣、傳輸及排氣的功能。本研究乾式真空螺旋幫浦逆向工程轉子為 單牙方螺紋,轉子外形設計必須能達成抽真空功能,運轉時二個爪子需避免干涉,而且兩者 不接觸。本研究逆向工程開發之雛型機經測試結果,其抽氣速率與真空壓力均可到達設計目 標,真空壓力可低於10□torr,抽氣速率在0.1 torr可達55m□/hr,在10torr時大於70m □/hr。逆向工程所建立之工程技術將做為開發新型幫浦之技術基礎。 |
英文摘要 | To establish the domestic dry vacuum pump technique, PIDC (Precision Instrument Development Center) had tried to use the reverse engineering tactivs to implement a dry vacuum pump prototype. The socalled dry vacuum pump is oilde free in the swept volume, it can handle process gases plus reaction byproducts, which may be corrosive, toxic, reactive and condensable. The carrier of reverse engineering is a screw vacuum pump with single stage and a pair of screw rotors. The reverse engineering technique, including measurement, drawing, and manufacturing, was applied to implement a dry vacuum pump prototype so as to establish the selfsupplied dry vacuum pump technology. The prototype developed by PICD can meet the ultimate pressure under 10□ torr. The pumping speed performance evaluations are larger than 55 m□/hr at 0.1 torr and larger than 70 m□/hr at 10 torr respectively. The achievements in the dry vacuum pump development and in the construction of pumping speed measurement system can promote the advancement of semiconductor equipment industry in Taiwan. The design process and considerations are introduced in this paper. |
本系統中英文摘要資訊取自各篇刊載內容。