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題名 | 應用於大面積微波電漿源之輻射共振腔原理探討=Theory of a Diffractive Resonator for Large Area Microwave Plasma Design |
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作者 | 洪健倫; 張存續; 朱國瑞; 戴涪; 呂康威; | 書刊名 | 真空科技 |
卷期 | 13:3 2000.09[民89.09] |
頁次 | 頁55-61 |
分類號 | 448.5 |
關鍵詞 | 電子磁旋共振微波電漿源; 微波共振腔; 品質因子; HFSS計算; Microwave resonant cavity; Electron cyclotron resonance; Plasma; Coupling coefficient; Quality factor; HFSS simulation; |
語文 | 中文(Chinese) |
中文摘要 | 微波共振腔可作為電子磁旋共振(Electron Cyclotron Resonance,簡稱ECR)微波電漿源系統的輸入結構。本文探討如何藉由共振腔尺度及共振模式的選擇,得到均勻、大面積的電磁場分布。擴大共振腔的直徑有利於大面積電漿之產生,但原先分離的共振模式亦因此而彼此緊鄰,導致單頻的入射微波源可能激發混雜的共振模式。我們運用三維頻域計算程式(HFSS),探討波導管和大面積共振腔之間的耦合及匹配,並依據模式分離的需求,確定其設計及優化原則。優化後的設計實例為一直徑50cm,工作在TE111模式及2.45GHz的大面積共振腔。HFSS程式計算顯示此共振腔具有良好的模式穩定性及高效率功率傳輸等優點。 |
英文摘要 | The microwave resonant cavity is studied as an input structure of a large area chamber for resonant generation of plasmas. We examine the principles of achieving a large area and uniform electromagnetic field distribution through proper choices of the cavity dimension and operating mode. Increasing the cavity diameter will enlarge the area of plasma creation, but the resultant high mode density may lead to excitation of unwanted modes under single frequency injection. We employ a 3D frequency-domain simulating code (HFSS) to determine coupling hole size and quality factor for the optimum coupling between the waveguide and a 50 cm diameter resonant cavity, which result in a single TE111 mode excitation at 2.45GHz with high efficiency of power transmission. |
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