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題名 | Comparison of the Effects of Steady Ampoule Rotation and Magnetic Fields on Flow and Segregation Control in Vertical Bridgman Crystal Growth=坩堝旋轉及磁場對垂直布氏法單晶生長之熱流及偏析之影響 |
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作者 | 藍崇文; | 書刊名 | Journal of the Chinese Institute of Chemical Engineers |
卷期 | 31:5 2000.09[民89.09] |
頁次 | 頁465-476 |
分類號 | 349.2 |
關鍵詞 | 坩堝旋轉; 磁場; 垂直布氏法; 單晶生長; Ampoule rotation; Magnetic fields; Segregation; Bridgman; Convection; Mixing; |
語文 | 英文(English) |
中文摘要 | 本研究以電腦模擬對坩堝旋轉及磁場在布氏法晶體生長之熱流及偏析控制上做比較探討。針對鎵參雜之鍺單晶在石墨坩堝之生長為例,坩堝旋轉及磁場都可有效控制對流。但控制之尺度律則顯著不同。坩堝旋轉之流場強度隨泰勒數之根號遞減,而在磁場作用下,流場強度隨哈特曼數之平方降低。然而,一旦流場強度已受磁場控制後,因角速度之軸向梯度減小,則坩堝旋轉的影響明顯減弱。然而,在Cusp的磁場下,旋轉效應則明顯加強。 |
英文摘要 | Computer simulation is conducted to compare the separate effects of steady ampoule rotation and magnetic fields, as well as their coupled effects, on flow and segregation control for vertical Bridgman (VB) crystal growth. Both axial and cusp fields are considered. A benchmark problem for the growth of gallium-doped germanium in a graphite ampoule is used as an example. It is found that both the magnetic fields and steady ampoule rotation effectively suppress the melt flow, but that their scaling laws are different. The flow intensity decreases linearly with the rotation speed, or Ta¯¹/², but quadratically with the magnetic field, or Ha¯². Under an axial magnetic field, the effect of rotation becomes less significant due to the reduced angular velocity gradients. However, with a cusp field, the effect of rotation is more significant. |
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