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題 名 | Emission Spectrum Measurement of the Rapid Thermal Processing Heating Source by Fourier Transform Infrared Spectroscopy=應用傅氏轉換紅外線頻譜儀量測快速熱程序爐加熱燈源之放射頻譜 |
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作 者 | 曲新生; 林森溥; 張謙成; 蘇俊傑; 閻建政; 曹仁杰; | 書刊名 | 中國機械工程學刊 |
卷 期 | 20:6 1999.12[民88.12] |
頁 次 | 頁553-562 |
分類號 | 336.512 |
關鍵詞 | 傅氏轉換紅外線頻譜儀; 快速熱程序爐; 加熱燈源; 放射頻譜; Rapid thermal processing; RTP; Heating source; Emission spectrum; Fourier transform infrared; FTIR; Spectroscopy; |
語 文 | 英文(English) |
中文摘要 | 本研究應用傅氏轉換紅外線頻譜儀來量測快速熱程序爐中不同加熱嶝源的放射頻 譜。本研究所使用之傅氏轉換紅外線頻譜儀係 Bomen 公司出品,型號為 MB-154;所使用之 加熱燈源係 Osram 公司出品, 型號分別為 No.64573 和 No.64743 的石英鎢絲鹵素燈泡。 量測其在不同的電壓下之放射頻譜,以了解這個燈泡於波長 0.7-20/ μ m 範圍放出輻射熱 能的情形。從量測到的結果顯示,鹵素燈泡的放射頻譜是由相當於鎢絲 0-4.5 μ m)、受熱 石英管 (4-9 μ m) 及燈源基座 (0-20 μ m) 之蝠射源的三個放射曲線所組成。 增高燈泡 的電壓將使鎢絲的溫度升高。 原則上,仍是遵守蒲郎克黑體輻射及威恩定律。 這些相當於 2000-2600K 鎢絲溫度之加熱燈源的放射頻譜的峰值大約在 1.9-2.5 μ m 的波長範圍或 4000-5200 cm- �薊漯i數範圍。 |
英文摘要 | The emission spectrum measurement of the rapid thermal processing (RTF) heating source by Fourier Transform Infrared (FTIR) spectroscopy is presented. The work has been carried out on two quartz-tungsten-halogen lamps of OSRAM type No.64573 and No.64743 at the different lamp voltages by Bomem MB-154 FTIR spectrometer from 0.7 μ m to 20 μ m. From our present experimental measurement results, it is found that the emission spectrum is superposed by three spectral curves located in the range of about 1-4.5 μ m, 4-9 μ m and 9 - 20 μ m, respectively, corresponding to the emission from the tungsten filament, the warm quartz glass tube and the base. Increasing the voltage of the lamp will increase the tungsten filament temperature. It also shows tliat tile results are principally in good agreement with the Planck's distribution law and Wien's displacement law. The spectral peak output of these heating sources, corresponding tungsten filament temperatures from about 2000K to 2600K, range from 1.9-2.5 μ m (4000 - 5200 cm- �� ). |
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