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題 名 | A Study on Shape Error Compensations of Hydrodynamic Polishing Process Applied in Small Wavelengths |
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作 者 | 洪春棋; | 書刊名 | 黃埔學報 |
卷 期 | 38 1999.12[民88.12] |
頁 次 | 頁365-379 |
分類號 | 446 |
關鍵詞 | Hydrodynamic polishing process; Shape compensation error; Small wavelength error; |
語 文 | 英文(English) |
英文摘要 | A process planning strategy for removing small wavelength error by hydrodynamic polishing process is proposed in this study. In according with this strategy, the basic theory of HDP shape error compensation deduce the distribution of initial tool stay time and amend it progressively by recursive linear rule. By the analysis of simulation, if the machining zone size smaller than error wavelength, we can get higher form precision. On the other hand, if the machining size larger than error wavelength, then the error compensation cannot be execute efficiently. However, if we set that former error wavelength to be roughness, the roughness error will be reduced naturally during machining process. It is also proved by experiment, we can get reach 0.15μm precision by this strategy. |
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