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題名 | Metal-Organic Chemical Vapor Deposition of Superconducting Metal Oxides=金屬有機化合物蒸氣沈積法製備超導金屬氧化物 |
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作者姓名(外文) | Obi-johnson,Bettie; Rees,William S.; | 書刊名 | 中央研究院化學研究所集刊 |
卷期 | 46 1999.06[民88.06] |
頁次 | 頁59-80 |
分類號 | 461.59 |
關鍵詞 | 金屬有機化合物; 蒸氣沈積法; |
語文 | 英文(English) |
英文摘要 | Superconductivity has attracted attention in the scientific community since 1986 with the potential of widespread application of devices based on various physical phenomena surrounding superconductors being realized once T �� is greater than the boiling point of liquid nitrogen. For those application requiring the employment of thin films of these superconducting metal oxides, chemical vapor deposition appears to be the preferred method of fabrication at the present time. This paper briefs the history and the fabrication by MOCVD, then details the vaporization of precursors, kinetics, delivery control, mechanistic analysis of the process, microscopic analysis of YBCO formation by MOCVD and mechanistic studies with individual YBCO precursors. |
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