頁籤選單縮合
| 題 名 | 半導體業揮發性有機物之空氣污染防治=Waste Gas Control Processes of Volatile Organic Compounds in the Semiconductor Industry |
|---|---|
| 作 者 | 王耀銘; 賴慶智; | 書刊名 | 化工資訊月刊 |
| 卷 期 | 13:6 1999.06[民88.06] |
| 頁 次 | 頁45-51 |
| 分類號 | 555.58 |
| 關鍵詞 | 半導體業; 揮發性有機物; 空氣污染防治; |
| 語 文 | 中文(Chinese) |
| 中文摘要 | 本文介紹半導體業所產生揮發性有機物之廢氣排放特性及防治現況,採用標準方 法NIEA A723.71B同時連續自動監測現有運轉中處理設備前及排放管道中的THC及VOCs。案 例研究對象為活性碳吸附、生物濾床及轉輪濃縮焚化技術,結果以轉輪濃縮焚化為效率最佳 的處理技術,去除率可達99%;生物濾床為操作成本最低的處理技術,但去除率只能達到70%; 活性碳為不適用之技術。 瑋N。 |
| 英文摘要 | This study investigates control efficiencies of various treatment processes for volatile organic compounds (VOCs) in the semiconductor manufacturing industry. An auto-monitoring GC machine is used continuously detect concentrations of THC and individual VOCs in emissions prior to and after the control equipments. Three processes, carbon adsorption, rotary concentration/incineration and biofiltration, are also investigated. Experimental results indicate that the control efficiency of VOCs for rotary concentration/incineration exceeds 90% and the highest amont among the processes. The biofiltration process, although having the lowest operating cost, has the lowest control efficiency, about 70%. The carbon adsorption process is not considered a feasible process owing to its extremely high cost of carbon replacement. Based on analysis of actual control processes in the semiconductor industry, this study provides valuable industrial informationon how to select air pollution control equipment. |
本系統中英文摘要資訊取自各篇刊載內容。