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題 名 | 臺灣光子源儲存環14米彎段鋁真空腔烘烤測試與其超高真空研究=Study of Ultra-High Vacuum System on the 14 m-long Aluminum Vacuum Chamber in Taiwan Photon Source Storage Ring |
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作 者 | 吳怜慧; 李宗諭; 陳志瑋; 楊易晨; 林怡君; 張育彬; 黃春憲; 黃英子; 張嘉航; 張鮮文; 鄭家沐; 陳柏穎; 張進春; 許憲能; 詹哲鎧; 鄭宇尊; 薛心白; 熊高鈺; 陳俊榮; | 書刊名 | 真空科技 |
卷 期 | 27:1 2014.03[民103.03] |
頁 次 | 頁15-20 |
分類號 | 449.32 |
關鍵詞 | 臺灣光子源儲存環; 氣壓增建法; 殘餘氣體分析儀; Taiwan photon source storage ring; Build-up; Residual gas analysis; |
語 文 | 中文(Chinese) |
中文摘要 | 本篇論文主要是敘述如何利用真空烘烤的技術與方法,使台灣光子源儲存環14米彎段鋁真空腔,到達超高真空。我們利用加熱帶纏繞真空腔及其元件,來烘烤腔體與其真空元件,達到除水與其他殘餘氣體的目的。真空元件包含前後段銜接閥門、抽氣閥門、可壓縮軟管、電子束位置量測計、離子真空計、非蒸氣式吸收幫浦、離子幫浦、光吸收器、光阻擋器、接前端區的閥門、角閥與殘餘氣體分析儀等。在系統烘烤降溫到攝氏50度與室溫時,會利用殘餘氣體分析儀分別進行氦氣測漏測試。降溫之後,真空系統氣壓可逐漸到達超高真空狀態(~10^(-11)Torr);在此超高真空系統中,我們利用氣壓增建法分析計算抽氣速率,並在氣壓增建時,搭配殘餘氣體分析儀,進行14米彎段鋁真空腔體內殘餘氣體的釋氣分析。 |
英文摘要 | This report is focused on the baking process and technology to achieve the ultra-high vacuum status in the 14m-long aluminum vacuum chamber in the Taiwan Photon Source (TPS) storage ring vacuum chamber. The tape heaters wound on the chamber and other vacuum parts to bake vacuum chamber and other vacuum parts for the purpose of removing water and other residual gas. The vacuum parts included the section gate valves, pumping gate valves, bellows, beam position monitors, extractor gauges, non-evaporable getter pumps, ion pumps, crotch absorbers, photon stoppers, front end valves, angle valves, residual gas analyzer (RGA) and so on. After the temperature of the vacuum system decreases to 50 oC and the room temperature, the helium leak test will be checked separately by using RGA. After decreasing the temperature to room temperature, the vacuum pressure can gradually achieve the ultra-high vacuum status (~10^(-11)Torr). For the TPS 14 m-long cell vacuum chamber, an ultra-high vacuum system, the pumping speed can be estimated during the build-up period. Besides, the outgassing of the residual gas can be also analyzed by RGA during the build-up period. |
本系統中英文摘要資訊取自各篇刊載內容。