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題 名 | 壓電薄膜表面彈性元件設計與製作=Piezoelectric Thin Film Saw Device: Design and Fabrication |
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作 者 | 張所宏; 陳志清; | 書刊名 | 國立臺灣大學工程學刊 |
卷 期 | 74 1998.10[民87.10] |
頁 次 | 頁139-153 |
分類號 | 448.57 |
關鍵詞 | MOD法; 表面彈性波; SAW元件; 壓電薄膜; 微機電系統; Metallo-organic decomposition; Surface acoustic wave; Piezoelectric thin film; MEMS; |
語 文 | 中文(Chinese) |
中文摘要 | 本文利用微穖電系統之微君工技術,應用有機金屬堆積鍍著法(簡稱MOD)製 作 PZT 壓電薄膜,設計與製造表面彈性波 (簡稱 SAW) 元件。 本文推導三層複合材料之表 面彈性波理論,經數值運算得相速度且與實驗結果比較。進而以實驗量測壓電薄膜之電性特 性與表面彈性波的中心頻率來得到相速度值及延遲時間得到群速度值、估計傳播損失等。本 文設計的表面彈性波元件包含三種薄膜厚度與波長。量測得中心頻率從 60 MHz 到 220 MHz ,相速度從 4200 m/s 到 5400 m/s。 |
英文摘要 | This paper presents design, fabrication and performance of piezoelectric thin film surface acoustic wave (SAW) devices prepared by the micromachining technology. The piezoelectric thin film is fabricated by the Metallo-Organic Decomposition (MOD) process. Theory of SAW devices propagating in three layers is formulated. The computed phase velocities are compared with the experimental results. The electrical properties of thin film, propagation loss, center transmission frequency, propagation delay time, phase velocity, and group velocity of SAW device are also measured in the experiments. Three sets of SAW devices containing different thin film thickness and wavelength are fabricated for evaluation. The measured results of the center transmission frequency are from 60 MHz to 220 MHz, and the phase velocities are from 4200 m/s to 5400 m/s. |
本系統中英文摘要資訊取自各篇刊載內容。