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題 名 | 非晶形三氧化鎢氣體感測元件之研究=Study on the a-WO[feb0]Gas Sensor |
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作 者 | 周榮泉; 熊慎幹; 楊恩旭; 廖宏魁; 紀立倫; 鄭永發; 陳建良; | 書刊名 | 材料科學 |
卷 期 | 30:2 1998.06[民87.06] |
頁 次 | 頁105-110 |
分類號 | 472.16 |
關鍵詞 | 非晶形三氧化鎢; 熱真空蒸鍍; 老化; 氣體感測器; 靈敏度; Amorphous tungsten trioxide; Vacuum thermal evaporation; Aging; Gas sensor; Sensitivity; |
語 文 | 中文(Chinese) |
中文摘要 | 本論文以熱真空蒸鍍(vacuum thermal evaporation)的方法,蒸鍍非晶形三氧化 鎢 (amorphous tungsten trIoxide, a-WO �� ) 的粉末, 備製非晶形三氧化鎢之薄膜於自 行設計的感測基板上, 再經過老化 (aging) 的過程,使得非晶形三氧化鎢之性質更穩定, 並予以封裝, 測試非晶形三氧化鎢薄膜對硫化氫 (H �� S) 之氣體感測,得知於 200 ℃時 有較佳的靈敏度, 利用此項性質設計氣體感測器並討論其反應機制, 亦探討對不同濃度 H �� S 氣體偵測的靈敏度、反應時間。 |
英文摘要 | In this paper, the amorphous tungsten trioxide (a-WO��) layer was deposited on the substrate by the vacuum thermal evaporation of the tungsten oxide powder. The film of a-WO��3 deposited on the substrate through aging process is more stable. The sensitivity of thea-WO �� 0 film to H�特 is found to increase substantially when the film is heated at about 200 ℃.We use this property to design gas sensor and discuss the reaction mechanism. In addition,we also will discuss sensor sensitivity and response time under different gas concentrations. |
本系統中英文摘要資訊取自各篇刊載內容。