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題 名 | [fea2]青石玻璃粉粒大小對基板燒結之影響=Effect of Particle Size of Cordierite Glass on the Sintering of Ceramic Substrate |
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作 者 | 林禎堂; 陳立軒; 傅勝利; | 書刊名 | 義守大學學報 |
卷 期 | 4 1997.08[民86.08] |
頁 次 | 頁69-83 |
分類號 | 464 |
關鍵詞 | [fea2]青石; 硼矽酸玻璃; 多層陶瓷基板; Cordierite; Borosilicate glass; Multilayer substrate; |
語 文 | 中文(Chinese) |
中文摘要 | 菫青石具有優良的特性,例如極佳的低介電常數,而且熱膨脹係數與矽晶片很接 近,所以是陶瓷基板的極佳材料,然而菫青石的燒結溫度較高,因此本研究中添加硼矽酸玻 璃作為燒結促進劑。首先將探討菫青石與硼矽酸玻璃顆粒的大小對燒結的影響,其次是將菫 青石與硼矽酸玻璃粉末,用低溫共燒法製成多層陶瓷基板,同時探討最佳燒結溫度與最佳持 溫時間等燒結條件。當菫青石與硼矽酸玻璃粉末顆粒均為較細的粉體時,在燒結溫度800℃ 而持溫時間30min 的燒結條件下,可得到緻密的燒結體。SEM觀察分析其斷面顯微結構,發 現燒結體中玻璃完全熔融,菫青石被玻璃所包圍,而且斷面顯微結構中氣孔較少,將上述粉 體利用刮刀成型技術,刮成長方形生胚片,將長方形生胚片均壓疊合,再經燒結後可得一緻 密的多層陶瓷基板o |
英文摘要 | Cordierite, with low dielectric constant and similar thermal expansion coefficient with silicon chip, is an excellant material for microelectronic packaging. However, owing to high sintering temperature of cordierite, borosilicate glass was thus added to promote the densification of cordierate. The influence of particle size on the densification of the cordierite-borosilicate glass composite was first investiged in this study. Low temperature cofirable multilayer substrate was then fabricated. The optimum sintering temperature and sintering time will also be discussed. When both the particle size of cordierite and borosilicate glass was finer, a well densified compact can be obtained after sintering at 800 ℃ for 30 min. From the SEM observation, cordierite was completely melted by the borosilicate glass and with the less existence of porosity. With the aid of doctor blading method, powders were casted into green tapes. After laminating and sintering, the multilalyer ceramic substrate was obtained. |
本系統中英文摘要資訊取自各篇刊載內容。