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題名 | The Apllication of V-Groove Solt-Array Method to the Piezoresistive Pressure Sensors=應用V型槽深度尺於壓阻式壓力計之製作 |
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作者 | 楊龍杰; 張培仁; 江振家; | 書刊名 | 中國工程學刊 |
卷期 | 20:3 1997.05[民86.05] |
頁次 | 頁335-341 |
分類號 | 471.3 |
關鍵詞 | 壓阻性; 壓力計; V型槽; Piezoresistive; Pressure sensor; V-groove; |
語文 | 英文(English) |
英文摘要 | 本文介紹一種確定壓力計薄膜厚度之簡易方法。該法係先於矽晶圓蝕刻一列深度 不一之V型槽,俾於製作薄膜結構時,依諸V型槽蝕穿與否,判定薄膜厚度至微米的解析度 。此法亦可檢查其他微細加工製程之均勻度。本文設計四種3x3x0.2mm�臚堣o的壓計,成功 證驗上法之可行性。並運用有限元素分析薄膜之受壓電阻變化。其中具中央加強結構之壓 力計,經測試具每大氣壓力9mV之靈敏度與1%之線性度。 uniformity of pressure sensors and give a guideline for further improvements in the batch process of silicon bulk micromachining. A series of pressure sensors with a chip size of 3x3x0.2mm �� were presented as the examples of the V-groove slot-array method. The finite element method (FEM) software ANSYS was accessed to predict the stress and resistance change of the sensors. The new pressure sensors with stiffened-bosses are tested and had a best sensitivity of 9.0mV/atm/V and a non-linearity less than 1% |
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