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題名 | Vibration and Stability Analysis of a Silicon-wafer Slicing Blade with PD Control during Cutting=具有PD控制器之矽晶片切割圓盤的振動與穩定性分析 |
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作者姓名(中文) | 張英俊; 賴光哲; 陳啟元; | 書刊名 | 大同學報 |
卷期 | 25 1995.11[民84.11] |
頁次 | 頁117-130+434 |
分類號 | 448.942 |
關鍵詞 | PD控制器; 矽晶片切割圓盤; 振動; 穩定性; |
語文 | 英文(English) |
中文摘要 | 本研究以-PD控制器來抑制矽晶片切割圓盤刀具切削一矽晶錠時所產生的振動 及橫向位移。此一矽晶片切割圓盤刀具,乃一外徑固定而內徑自由之環形圓盤。在本研究中 ,以賈拉金( Galerkin Method )法來分析一實際 SUS301 刀具切割一 6 吋矽晶錠的振動 情形。研究結果顯示在控制力的作用下,雖然無法提升系統的臨界轉速,且激發了更多的不 穩定區域,但確能在操作轉速( 1550 rpm )下,有效的抑制其振動及橫向位移。若單純使 用P控制或D控制,皆各有其優缺點。P控制可有效的減低系統的穩態響應,但無法抑制振 動的發生;而D控制抑制了系統振動,但對系統的穩態響應沒有影響。因此使用PD控制器 來達成抑制振動及橫向位移的目標。 |
英文摘要 | A proportional-derivative controller is introduced to suppress the vibration and lateral deflection of a silicon-wafer slicer cutting the crystal ingot. The vibration of an outer-clamped blade under control is investigated. The galerkin method is then employed for an approximate solution of the spinning blade. Numerical results are presented for an actual SUS 301 blade cutting a 15.24 cm diameter silicon ingot. It is found that the blade without control has two types of instability, divergence and flutter types. The frequencies of blade under control are found. The results obtained show that the controller stabilizes the blade at operation speed of 1550 rpm, though it hardly changes the lowest critical speed and excites more instability region above the critical speed. The proportional control and the derivative control have advantages and disadvantages. The proportional controller can decrease the steady state response, but has no effect on eliminating the vibration. The derivative controller has the merit in suppressing the vibration. And its demerit is that it has less effect on reducing the deflection of steady state response. Thus, in order to suppress the vibration and deflection, a proportional-derivative controller is developed to achieve the object. |
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