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題名 | 渦輪分子幫浦單級二維流道之直接模擬蒙地卡羅法計算=Numerical Calculations in Two Dimensions for a Single Stage Turbomolecular Pump by Direct Simulation Monte Carlo Method |
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作者姓名(中文) | 張郁雯; 周榮源; | 書刊名 | 真空科技 |
卷期 | 12:1 1999.05[民88.05] |
頁次 | 頁7-15 |
分類號 | 446.74 |
關鍵詞 | 渦輪分子幫浦; 模擬; 蒙地卡羅法; Numerical calculations; Single stage turbomolecular pump; Direct simulation monte carlo method; DSMC; |
語文 | 中文(Chinese) |
中文摘要 | 本研究利用直接模擬蒙地卡羅法模擬渦輪分子幫浦單級二維流場,主要計算幫浦 在流速為零時,流場與各設計參數如轉子轉速、葉片傾斜角及葉片間距與葉片寬比等之關係 ,並將計算所得之最大壓縮比與 Kruger 使用蒙地卡羅法計算之結果做一比較;此外並計算 不同之紐森數時之流場,比較所得之最大壓縮比與紐森數之關係,藉以提供渦輪輪分子幫浦 設計之參考。計算所得結果顯示在典型的設計參數之下,渦輪分子幫浦在高真空段之表現的 確較佳,且與 Kruger 所得結果穩合,即使紐森數降到 10 時仍可適用於 Kruger 未考慮分 子間碰撞之計算結果;較極端的設計參數則否。而在其他設計參數固定且為一般值時,紐森 數極小時對最大壓縮比所產生之影響與轉速極大或葉片傾斜角極小時所產生之影響十分類似 。 |
英文摘要 | Numerical results using the Direct Simulation Monte Carlo method are presented for the two dimensional gas flow of a single stage turbomolecular pupm. The flow field is calculated at zero pumping speed with different design parameters such as rotor speed, blade angle and blade spacing to chord ratio. The resulting maximum pressure ratios are compared with the Kruger's. They show a good agreement under normal design parameters. The flow field also calculated at different Kundsen numbers. The relationship between the maximum pressure ratio and Kundsen number is investigated. The result shows that the intermolecular collisions must be considered when Knudsen number is below 10 under some extreme design parameters. And in such cases, the effect caused by low Kundsen number is very similar to that caused by high rotor speed or small blade angle. |
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