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| 題 名 | 以PECVD法在SKD61模具鋼表面被覆Tic、TiN、TiCN單層及多層膜之研究 |
|---|---|
| 作 者 | 王曉靁; 何主亮; 洪敏雄; | 書刊名 | 金屬工業 |
| 卷 期 | 26:5 1992.09[民81.09] |
| 頁 次 | 頁68-78 |
| 分類號 | 472.16 |
| 關鍵詞 | 多層膜; 表面; 單層; 模具; 鋼; |
| 語 文 | 中文(Chinese) |
| 中文摘要 | 本研究以電漿化學蒸鍍(PECVD)法在SKD61模具鋼表面蒸化鍍碳化鈦、碳氮化鈦、氮化鈦(TiC,TiCN,TiN)和其多層膜,探討PECVD TiC,TiCN單一鍍層之蒸鍍條件對鍍層微觀結構,成長速率和機械性質之影響,再探討多層膜之硬及耐磨耗性。 研究結果顯示,碳化鈦(TiC)之蒸鍍在沉積溫度350℃以,鍍層為柱狀組織;碳氮化鈦(TiCN)蒸鍍在400℃以上可得結晶質鍍膜,亦成柱狀組織,二者之成長速率受參數影響,碳化鈦(TiC)之表面硬最大可達HV 2000而碳氮化鈦(TiCN)則為HV 1800。 多層被覆Ti(C,N)之表面視硬度受頂層覆材質影響較大,在550℃蒸鍍,總膜厚為3um時,以碳化鈦(TiC)為頂層被覆視硬度約為HV 900,以氮化鈦(TiN)為頂層被覆則約HV 700,磨耗實驗結果顯示,蒸鍍條件對試件的耐磨耗性有顯著影響,其中以蒸鍍溫度影響最大,蒸鍍溫度在500-550℃之間可獲得最佳之耐磨耗性,以未被覆之SKD 61試件磨耗之耐磨性為1,則碳化鈦(TiC),氮化鈦(TiN)單層被覆可達4.5倍,而氮化鈦/碳氮化鈦/碳化鈦(TiN/TiCN/TiC)多層被覆組合最高可達23.5倍。 |
| 英文摘要 | PECVE precess was used to deposit TiC, TiCN, TiN single layer coating and composite coating of TiC, TiCN, TiN on SKD61 steel. Film characteristics including microstructure, growth rate of these coatings were investigated. Mechanical pro-on-disk method were evaluated. Experimental results showed that an adherent TiC coating with columnar structure was obtained at a substrate temperature above 350℃, while the TiCN film was obtained at a substrate temperature above 400℃. Growth rate of the Tic and TiCN films was affected by coating parameters. Mazi-mum hardness of Hv2000 for TiC film and Hv1800 for TiCN film were obtained. The apparent hardness of the umltilayer coating is determined primarily on the top layer. Wear test results showed that a significant improvement for the multilayer coated specimen was obtained comparing with the one with single layer coating. A maximum factor of 23.5 for the wear resistance of the multilayer coated Tin/TiCN/TiC specimens is greater than the uncoated specimen while a mazimum factor of only 4.5 is obtained for the single layer coated one. |
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