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題 名 | 單晶生長機溫度控制裝置之改良及其應用 |
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作 者 | 林澤義; | 書刊名 | 中原學報 |
卷 期 | 6 1977.12[民66.12] |
頁 次 | 頁29-36 |
關鍵詞 | 單晶生長機; 溫度控制; 裝置; |
語 文 | 中文(Chinese) |
中文摘要 | 生長單晶之流程中,放肩後之降溫過程,在實驗室中之自製單晶生長機,多靠機械式之操作,改變溫度控制器之定溫點,很難做到緩慢而且平滑之要求,本文以加偏壓式方式取代機械式之操作,對單晶之生長有良好且能勝任之效果。並介紹此偏壓方式之其他應用。 |
英文摘要 | Mechanical method is usually used during the cooling process in the laboratory crystal growth. By using this conventional method, it is normally quite difficult to achieve slow and smooth variation in temperature, and frequently the temperature change after each operation is not known. To avoid such difficalty, we have introduced an electrical bias method, which seems to be a great improvment in controling the temperature. Some of the other possible applications of the present method is also mentioned. |
本系統中英文摘要資訊取自各篇刊載內容。