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| 題 名 | 線上即時監控前驅物與雜質的NDIR氣體監測儀=In-line NDIR Gas Monitor for Precursor and Impurity Monitoring |
|---|---|
| 作 者 | 志水徹; | 書刊名 | 科儀新知 |
| 卷 期 | 242 2025.03[民114.03] |
| 頁 次 | 頁58-63 |
| 專 輯 | 「半導體製程檢測設備與in-situ技術」專題 |
| 分類號 | 448.65 |
| 關鍵詞 | 半導體製程; 前驅物; NDIR氣體監測儀; |
| 語 文 | 中文(Chinese) |
| 中文摘要 | 用載流氣體傳送前驅物蒸氣的方法稱為bubbling method,在CVD/ALD製程穩定性上有時會遇到技術挑戰。為解決此問題,專門設計了一款線上NDIR(nondispersive infrared)氣體監測儀,用於監控商用化的前驅物及其所含的雜質。該研究針對兩種不同鋼瓶,觀察了前驅物與雜質的行為,包括閒置時間的影響。研究結果顯示,使用線上NDIR氣體監測儀監測前驅物,可得知於不同鋼瓶間的差異性及製程開始前的前驅物狀態和穩定所需的時間,幫助提高生產良率。 |
| 英文摘要 | Precursor delivery by using carrier gases, called bubbling method, faces technical challenges on the production stability of CVD/ALD. An in-line NDIR (nondispersive infrared) gas monitor was designed to monitor a commercially available precursor and one of its impurities. The behaviors of the precursor and the impurity including the effect of idle time were observed for two different canisters. This article shows that monitoring precursors with in-line NDIR gas monitors may help to improve production yields by ensuring differences between canisters, the precursor status and the stabilization time before starting the process. |
本系統中英文摘要資訊取自各篇刊載內容。