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題 名 | 潔淨室4×4高功率FFU之高效率外轉子馬達設計=High-efficiency Outer Rotor Motor Design for 4×4 High-power FFU in Clean Room |
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作 者 | 蘇育霆; | 書刊名 | 潔淨科技 |
卷 期 | 51 2024.02[民113.02] |
頁 次 | 頁26-29 |
分類號 | 446.262 |
關鍵詞 | 外轉子馬達; 馬達設計; 風機過濾機組; Outer rotor motor; Motor design; FFU; |
語 文 | 中文(Chinese) |
中文摘要 | 近年來半導體產能需求增加,需要大量能源。在總能源中,設施系統佔晶圓廠能耗的 56.6 %。其中,潔淨室空 氣系統佔據總耗電量的 7.4 %。為推動淨零碳排之目標,藉由提升風機效率以降低設施系統用電量。本研究根據 市場 4×4 高功率型 FFU 需求之風機規格,制定且設計一型高效率外轉子馬達,並詳述馬達設計流程、打樣及測 試結果。最終,該馬達幾何高度 75 mm、外徑 128.3 mm,轉速 1300 rpm、輸出扭矩 2.5 N-m,其馬達單體效率 為 89.52 %。 |
英文摘要 | In recent years, the demand for semiconductor production capacity has increased, requiring a large amount of energy. Among the total energy, facility systems account for 56.6% of the energy consumption of wafer fabs. Among them, the clean room air system accounts for 7.4% of the total power consumption. To promote the goal of net-zero carbon emissions, the power consumption of facility systems is reduced by improving fan efficiency. This study formulates and designs a high-efficiency outer rotor motor based on the fan specifications required for 4×4 high-power FFU in the market, and details the motor design process, sampling and test results. Finally, the motor has a geometric height of 75 mm, an outer diameter of 128.3 mm, a rotational speed of 1300 rpm, an output torque of 2.5 N-m, and a single motor efficiency of 89.52%. |
本系統中英文摘要資訊取自各篇刊載內容。