頁籤選單縮合
題 名 | Efficient Method for Testing the Batch-Processing Process Yield=效率的方法用以檢測批量生產方式下的製程良率 |
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作 者 | 廖茂原; 吳建瑋; | 書刊名 | International Journal of Information and Management Sciences |
卷 期 | 27:1 2016.03[民105.03] |
頁 次 | 頁a6+1-16 |
分類號 | 494.56 |
關鍵詞 | 廣義信賴區間; 多批量; 製程良率; Generalized confidence interval; Multiple batches; Process yield; |
語 文 | 英文(English) |
英文摘要 | Batch manufacturing processes have been widely used in various manufacturing processes, such as wafer fabrication, IC fabrication, and gridline printing process in the solar battery fabrication. In a batch manufacturing process, products are produced batch-by-batch. Thus, total process variations are generally divided into batch-by-batch variation and within-batch variation. The main purpose of this study is to provide an efficient method for testing the batch-processing process yield. Base on the one-way random effect model, the generalized pivotal quantity is utilized to establish the generalized confidence interval for assessing the process yield index. By simulations, the proposed method shows that its empirical coverage probability is not affected by the batch effect, and is still close the nominal coverage probability as the batch size increases. |
本系統中英文摘要資訊取自各篇刊載內容。