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題名 | 以金屬應力自組法製作三維裂環共振器及其特性分析=Characterization of Three Dimensional Split Ring Resonators Fabricated by Stress-Driven Self-Assembly Method |
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作者姓名(中文) | 陳哲勤; 湯喻翔; 蕭銘華; 蔡定平; | 書刊名 | 科儀新知 |
卷期 | 198 2014.03[民103.03] |
頁次 | 頁55-62 |
專輯 | 微奈米技術應用專題 |
分類號 | 448.533 |
關鍵詞 | 人造光學超穎材料; 三維裂環共振器; 金屬應力自組法; |
語文 | 中文(Chinese) |
中文摘要 | 裂環共振器為人造光學超穎材料最重要之基本結構之一,在邁向更高頻應用中,三維化的課題則是現階段所遭遇的最大困難點。本研究提出一項簡單的製程架構,結合微影術與乾式蝕刻技術,利用金屬應力自組法,可輕易地製作紅外波段之三維裂環共振器,並透過光譜量測及數值模擬分析,研究電磁波與元件交互作用所顯現之光學特性。 |
英文摘要 | The split ring resonator is one of the most important meta-atom for constructing the artificial photonic metamaterials. For higher frequency applications, the most difficult part is to fabricate the three-dimensional structures. In this study, we demonstrate a simple strategy by utilizing metal-stress self-assembly method to fabricate infrared three-dimensional split ring resonators. This strategy is simply involved lithography and dry etching processes. The electromagnetic properties are characterized through both spectrum experiments and numerical simulations. |
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