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題 名 | 提拉速率對藍寶石晶體生長之影響=The Influence of Pulling Speed on the Growth of Sapphire Single Crystal |
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作 者 | 吳玉祥; 黃重浩; | 書刊名 | 中華科技大學學報 |
卷 期 | 56 2013.07[民102.07] |
頁 次 | 頁1-19 |
分類號 | 357.84 |
關鍵詞 | 凱氏長晶法; 藍寶石; 單晶; 提拉速率; Kyropoulos method; Sapphire; Single crystal; Pulling speed; |
語 文 | 中文(Chinese) |
中文摘要 | 本研究使用凱氏長晶法(Kyropoulos method)生長藍寶石(Sapphire)單晶,探討藍寶石生長過程中,提拉速率的快慢對藍寶石品質之影響。在以較快的提拉速率設定晶體生長參數中,先以0.5 mm/hr持續24小時,再以0.3 mm/hr持續15小時,最後以0.1 mm/hr持續90小時直到製程結束;而較慢的提拉速率是以0.3 mm/hr持續65小時,接著以0.1 mm/hr持續93小時直到製程結束。將兩顆晶體進行外觀形狀與清澈度比較,並以強光照射觀察晶體內部雜質及氣泡等巨觀缺陷分析。結果顯示,提拉速率較快的晶體,因初期生長時間過短,造成晶身生長過快,晶體形狀類似圓錐狀,且出現晶體黏鍋的情形,晶體出現三個重大缺陷:首先是黏鍋處在脫離坩鍋時出現裂痕;再者晶身過於接近坩鍋,導致晶體在冷卻階段降溫過快,出現大面積裂痕;最後晶體底部附著大量的雜質,無法達到商品化的要求。提拉速率較慢的晶體,因晶體初期與中期的生長階段緩慢且長時間生長,因而呈現明顯的圓柱狀,沒有因為過快的生長造成黏鍋情形發生,晶體呈現透明狀,可符合商品化的規格要求。 |
英文摘要 | This study used Kyropoulos method to explore the influence of pulling speed for the growth of sapphire single crystal that investigated the sapphire quality during the growing process. In setting faster pulling rates for crystal growth parameters, initially we run with 0.5 mm/hr for 24 hours, then 0.3 mm/hr for 15 hours, and finally with 0.1 mm/hr for 90 hours to the end of the process. In setting the slower rates, we run with 0.3 mm/hr for 65 hours, then 0.1 mm/hr for 93 hours to the end of the process. The two crystals were compared by the appearance and clarity, and observed for the internal impurities, bubbles and other macroscopic defects under strong light. Due to the insufficient time in early growing stage caused in excessive crystal body growth, cone-shaped crystal shape, and pot-sticking situation. The result suggests that the crystal growth under faster pulling rate appeared three major defects. Firstly, the cracks were made at the pot-sticking areas when leaving the crucible. Secondly, large areas of cracks appeared since the crystal body closed to crucible so that the crystal temperature dropped too fast. Last, there were a large amount of impurities attached to the bottom of the crystal and made it unqualified for the commercialization. On the other hand, due to the slow and long-term growing time during the early- and mid-growing stage, the crystal growth under slower pulling rate presented an obvious cylindrical shape, no pot-sticking situation, transparency and qualifications for the commercial specifications. |
本系統中英文摘要資訊取自各篇刊載內容。