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題名 | 大型鋁合金真空腔無油酒精精密加工技術=Oil-free Alcohol Machining Technology for the Large Aluminum Vacuum Chambers |
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作者 | 張進春; 翁文川; 許憲能; 熊高鈺; | 書刊名 | 真空科技 |
卷期 | 25:2 2012.06[民101.06] |
頁次 | 頁45-50 |
分類號 | 472.5 |
關鍵詞 | 無油酒精加工法; 鋁合金真空腔體; 釋氣率; Oil-free machining; Aluminum vacuum chamber; Outgassing rate; |
語文 | 中文(Chinese) |
中文摘要 | 本文主要描述大型鋁合金真空腔無油酒精精密加工技術在國內發展的歷程、加工原理、刀具設計、優缺點及其作業前後相關注意事項。透過經酒精加工後之鋁合金真空腔體表面分析與抽氣測試結果顯示,經酒精加工後之腔體表面具備高潔淨與低含碳量表面,再經抽氣烘烤 24 小時後,腔體釋氣率 < 1.4×10-14 Torr‧L/(s.cm2)、腔體氣壓 < 6.2×10-10 Torr 並隨時間增長而繼續下降。證實此加工技術不僅可製備高精密之鋁合金真空腔體更可獲得高潔淨與低污染之腔體表面。 |
英文摘要 | A precision machining technology with oil-free alcohol method for the large aluminum vacuum chambers has been developed. In this article, the original oil-free alcohol machining process, principle, cutter design and its merit and demerit for the fabrication of a large aluminum vacuum chamber will be described and discussed.The results obtained from the AES surface analysis indicate that the method of oil-free machining with alcohol provides a lower carbon content and high cleanliness surface on the vacuum chamber. In the pumping test, the outgassing rate and pumping down pressure have been measured through the pumping and baking process. It shows that a lower surface outgassing rate < 1.4×10^(-14) Torr‧L/(s‧cm^2) and a pressure < 6.2×10^(-10) Torr was obtained after baking at 150 °C for 24 hours. It proves this technique not only carry out aluminum vacuum chamber machining but also obtain a high cleanliness and low contaminated chamber surface. |
本系統之摘要資訊系依該期刊論文摘要之資訊為主。