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題名 | 應用FPGA即時控制及對稱橋型機構於奈米定位平臺研製=Development of Nano-positioning Stage with Symmetric Bridge Mechanism and FPGA Real-time Control |
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作者 | 陳朝榮; 吳忠倫; 修芳仲; 劉科震; Chen, Chao-jung; Wu, Chung-lun; Shiou, Fang-jung; Liou, Ke-jhen; |
期刊 | 先進工程學刊 |
出版日期 | 20110700 |
卷期 | 6:3 2011.07[民100.07] |
頁次 | 頁169-175 |
分類號 | 446.84 |
語文 | chi |
關鍵詞 | 奈米定位平臺; 橋型位移放大機構; 電容式位移感測器; PID控制; FPGA晶片; Nano-positioning stage; Bridge displacement magnification mechanism; Capacitive sensor; PID control; FPGA chip; |