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題名 | Development of a 2-axis Closed Loop Micro-/Nano- Positioning Stage Embedded with 2 Fiber Optical Interferometer Systems=二軸閉迴路微/奈米定位平臺整合二光纖干涉儀量測系統之研製 |
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作者姓名(中文) | 修芳仲; 許學豐; 陳朝榮; 劉惠中; | 書刊名 | 中國機械工程學刊 |
卷期 | 29:6 2008.12[民97.12] |
頁次 | 頁497-502 |
分類號 | 448.94 |
關鍵詞 | 二軸閉迴路微/奈米定位平臺; 光纖干涉儀量測系統; PID控制; Piezoelectric actuator; Micro-/nano-positioning stage; Fiber optical interferometer system; ANSYS; Double compound leaf spring; |
語文 | 英文(English) |