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題 名 | 利用紋理特徵擷取計算光學薄膜之柱狀傾角=Using Texture Feature Extraction to Determine the Optical Thin Film of Column Angle |
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作 者 | 趙榮輝; 陳炯良; | 書刊名 | 德霖學報 |
卷 期 | 22 2008.06[民97.06] |
頁 次 | 頁265-268 |
分類號 | 448.59 |
關鍵詞 | 光學薄膜; 紋理特徵; 柱狀傾角; Optical thin film; Texture feature; Column angle; |
語 文 | 中文(Chinese) |
中文摘要 | 在製鍍光學薄膜的過程中,常因製程的誤差,使製鍍完成薄膜的柱狀傾角產生角度誤差,為了求出 柱狀的角度,故本研究特別利用紋理特徵擷取法中方向性分析來精確求出光學薄膜的柱狀傾角,除了有 良好的準確性外,對於未知柱狀傾角的薄膜結構有不錯的適用性。 |
英文摘要 | The angular error is constantly generated by the column angle during the process of deposition on optical thin film due to the inaccuracy of process. In order to derive an angular magnitude of column, this paper is inspired to precisely acquire a column angle of optical thin film by using the orientation analysis of texture feature. It not only provides a certain degree of accuracy, but also has proper application to thin film structure of the unknown column angle. |
本系統中英文摘要資訊取自各篇刊載內容。