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頁籤選單縮合
題名 | 閃頻影像式橢圓偏光儀/偏光儀=Stroboscopic Illumination Photoelastic Modulated Imaging Ellipsometry/Polarimetry |
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作 者 | 趙于飛; 韓建遠; 蔡修銘; | 書刊名 | 科儀新知 |
卷期 | 30:5=169 2009.04[民98.04] |
頁次 | 頁75-83 |
分類號 | 336.2 |
關鍵詞 | 閃頻影像式橢圓偏光儀; 光彈調變器; 偏光儀; 穆勒矩陣影像式偏振量測術; |
語文 | 中文(Chinese) |
中文摘要 | 閃頻式影像橢圓偏光儀克服電荷耦合元件在傳輸及儲存緩慢的缺點。一般電荷耦合元件至少需要0.03秒方能取得一張照片,所以無法擷取光彈調變器50kHz的信號。利用與光彈調變器同頻率的短脈衝光源,在某特定時間放射,即可凍結特定相位,進而取像再轉成橢圓偏光參數而成影像式橢圓偏光儀。本文乃運用此影像式橢圓偏光儀量測一個具有結構的二氧化矽薄膜,以及一油滴沿著矽晶片滑下的過程,藉其厚度的二維分布,以呈現橢圓偏光儀的影像功能。現以同樣的理念實施在偏光儀,稱之為穆勒矩陣影像偏光儀,利用Lu-Chipman極化矩陣的分解法,可以減少材料對入射光散射的影響,故用以量測生物介質。在此以偏光儀觀測九官皇冠葉的乾燥過程。 |
英文摘要 | A novel stroboscopic illumination technique is applied in a photoelastic modulated ellipsometry/polarimetry to conquer the slow imaging processing of charge-coupled device camera system and form a fast imaging ellipsometry/polarimetry. The synchronized ultrastable short pulse is used to freeze the intensity variation of the PEM modulated signal. The 2D thickness profile of a static patterned SiO2 thin film on silicon substrate and the drainage behavior of matching oil on silicon wafer were studied by this imaging ellipsometry. In addition to the ellipsometry, a Mueller matrix polarimetry is also constructed by the similar technique. The drying process of Echinodorus uruguayensis is analyzed by the polarimetry. Lu-Chipman's polar decomposition technique is used to remove the depolarization, which is caused by the multiple scattering in the medium. Under drying process, the variation of linear birefringence of leaf is observed by this imaging polarimetry. |
本系統之摘要資訊系依該期刊論文摘要之資訊為主。