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題 名 | 以超臨界流體技術回收模擬ITO製程蝕刻廢液中銦之研究=The Supercritical Fluid Technology on the Recovery of Indium from the Simulated Etching Wastewater of ITO Process |
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作 者 | 周偉龍; 張皓翰; 劉惠銘; 易光輝; 陳勇瑞; 李宏凱; | 書刊名 | 弘光學報 |
卷 期 | 49 民95.11 |
頁 次 | 頁249-255 |
分類號 | 460.02 |
關鍵詞 | 超臨界流體萃取; 螯合劑; 氧化銦錫; 蝕刻廢液; Supercritical fluid extraction; Chelating agent; Indium tin oxide; ITO; Etching wastewater; |
語 文 | 中文(Chinese) |
中文摘要 | 近年來半導體相關產業迅速發展,半導體相關產品需求量大增,因此以光電半導體為首的平面顯示器產量增加,而氧化銦錫(ITO)為平面顯示器中重要的透明電極材料。超臨界流體萃取(Supercritical Fluid Extraction;SFE)為一種樣品前處理分離技術,使用上有減少有機溶劑消耗量的優點,使用後不會產生殘留而造成環保及安全上的問題,因此超臨界二氧化碳是綠色溶劑之一,用以取代傳統的有機溶劑,達到近年全球保護環境所推動具綠色科技之效益。本研究將以超臨界流體萃取做為前處理,然後以原子吸收光譜定量之。經實驗得到最適萃取溫度為70℃,萃取壓力2000psi。在添加各種螯合劑的研究中,由於含銦金屬為非電中性不易溶解於二氧化碳中,故必須添加適用的金屬螯合劑使金屬離子形成電中性螯合物將可溶於超臨界二氧化碳中,並添加適量的修飾劑甲醇以提高物質在超臨界二氧化碳中之溶解度。結果顯示螯合劑TTA及自行合成螯合劑PySH在所有螯合劑中有最佳的萃取率,分別為75.4±3%和83.1±1.7%。 |
英文摘要 | In the rapid growing domestic semiconductor manufacturing industry, indium semiconductor complexes are commonly used in various applications, such as tin-doped indium oxide (ITO) film, liquid-crystal display, and optical devices. Most of the metal indium and its compound were hazard materials and found to be carcinogenic. Due to its cheap, non-toxic, and mild operating condition natures, supercritical fluid extraction (SFE) using carbon dioxide agent served as a sample pretreatment step for recovering indium from the simulated waste water of ITO process in this research. After sample pretreatment, the indium concentration in simulated etching wastewater was directly quantified by FAAS. Our results indicated that the optimal extraction condition by SFE was achieved at 70°C and 2000 psi. Direct extraction of metal indium from wastewater by SFE was feasible owing to the charge neutralization requirement and the weak solvent interaction. Indium ions in simulated etching wastewater could be extracted by methanol modified and spike with suitable chelating agents such as TTA and PySH. It was revealed that the optimal extraction efficiency with TTA and PySH were 75.4±3% and 83.1±1.7%, respectively. |
本系統中英文摘要資訊取自各篇刊載內容。