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題名 | 以鈷鐵鋯硼合金催化劑成長奈米碳管之研究=Characteristics of Carbon Nanotubes Synthesized Using Co[92eb]Fe[8fac]Zr[fed4]B[8fac] Alloy Catalysts in MPCVD |
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作者姓名(中文) | 廖坤厚; 丁志明; 周德威; 楊植合; | 書刊名 | 航空技術學院學報 |
卷期 | 5:1 民95.08 |
頁次 | 頁33-38 |
分類號 | 440.34 |
關鍵詞 | 奈米碳管; 微波電漿輔助化學氣相沉積法; 薄膜厚度; 成長機制; Carbon nanotube; MPCVD; Thin film thickness; Growth mechanism; |
語文 | 中文(Chinese) |
中文摘要 | 本研究以微波電漿輔助化學氣相沉積法(MPCVD)在不同厚度之Co52Fe20Zr8B20催化劑薄膜上成長奈米碳管 (CNT),成長之混合氣體為CH4/H2、成長溫度為390℃,此催化劑薄膜在氫氣電漿蝕刻後之催化劑顆粒大小隨薄膜厚度增加而變大,不同薄膜厚度之催化劑所成長之奈米碳管的平均直徑大小也隨著薄膜厚度增加而增加,其碳管長度則隨薄膜厚度增加而減少,此奈米碳管的成長速率最高為0.9μm/min,碳管的分布密度約為108/cm2,其中較大直徑之碳管(大催化劑顆粒)的成長型態與模式屬於催化劑顆粒本體擴散的成長機制,較小直徑之碳管(小催化劑顆粒)的成長型態與模式屬於催化劑顆粒表面擴散的成長機制。 |
英文摘要 | Carbon nanotubes (CNTs) were grown on amorphous Co52Fe20Zr8B20 thin film catalysts with various thickness in a microwave plasma-enhanced chemical vapor deposition (MPCVD) system under a gas mixture of methane and hydrogen. The CNTs growth temperature was 390℃. The average particle size of pre-growth etched catalyst thin film increases with the film thickness. The average diameter of CNTs also increases with the film thickness. However, the average length of the CNTs was found to decreases with the film thickness. The growth rate and area-density of CNTs are 0.9μm/min and 108/cm2, respectively. Depending on the diameter of CNT, the diffusion of carbon in the catalyst particle are either a bulk diffusion (larger diameter) or surface diffusion (smaller diameter). |
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