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題 名 | 高密度電漿蝕刻應用於850nm面射型雷射之製程與特性研究=Characterization and Fabrication of 850-nm Vertical-Cavity Surface-Emitting Lasers by High Density Plasma Etching |
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作 者 | 蔣承忠; 李逸駿; 胡飛名; 貢中元; 洪瑞華; 武東星; | 書刊名 | 真空科技 |
卷 期 | 15:4 2002.11[民91.11] |
頁 次 | 頁17-24 |
分類號 | 448.552 |
關鍵詞 | 電漿蝕刻; 垂直共振腔面射型發光雷射; VCSEL; |
語 文 | 中文(Chinese) |
中文摘要 | 本論文利用高密度電漿蝕刻進行垂直共振腔面射型發光雷射(VCSEL)製程,我們藉由探討蝕刻參數的改變,如Cl2/Ar氣體混和比例、製程腔體壓力、ICP功率及基板偏壓的功率得到了850nm面射型雷射乾蝕刻特性而實驗時的電漿氣氛如離子通量、直流偏壓,我們利用Langmuir Probe量測顯示電漿氣氛和蝕刻結果的強烈關係。在氣體Cl2/(Cl2+Ar)=0.9的混合比例、ICP功率800W、基板偏壓的功率100W、製程腔體壓力6.67×103mb的條件下,最大蝕刻速率1.8μm/min並具有垂直及光滑的側壁,接著利用氧化侷限法製作元件,並對其元件的光電特性進行探討,起使電流於光窗口為20μm時可至6mA,光功率輸出於光窗口為50μm直徑時可達1.2mW。 顯著差異(P>0.05),在肝重方面各組間無顯著差異(P>0.05),肝臟中AST、ALP、LDH及CK等酵素之活性均無顯著差異(P>0.05),肝臟組織切片均為正常,並無脂肪肝現象。 |
英文摘要 | In this study, an inductively coupled plasma (ICP) reactor was used for the fabrication of Vertical-cavity surface emitting laser (VCSEL) device. The etching characteristics were investigated by varying process parameters such as Cl2/Ar gas combination, chamber pressure, ICP power and substrate-bias power. The corresponding plasma properties (ion flux and dc bias), in-situ measured by a Langmuir probe, show a strong relationship to the etch results. With a moderate etch rate of 1.8 (m/min, a near vertical and smooth sidewall profile can be achieved under a Cl2/(Cl2+Ar) gas mixture of 0.9, ICP power of 800W, substrate-bias power of 100W, and chamber pressure of 5 mtorr. Following, the VCSELs were accomplished by confinement process by the wet oxidation furnace. The threshold current with 20μm diameter aperture can be reduced to 6mA. An output power of 1.2mW can be obtained with a 50μm diameter aperture. ntly difference (P>0.05) among treatments. In addition, all the broilers were normal in the aspect of leg problems. After two weeks of Roxarsone withdrawal, the body weight of the chickens did not show a significant difference (P>0.05), except that 400mg/kg Roxarsone group showed lower body weight (P<0.05), and liver weight. However, the activities of AST, LDH, ALP and CK in the serum did not show significant difference (P>0.05) among treatment group. All the liver function was normal and fatty liver symptom was observed from the histological examination. |
本系統中英文摘要資訊取自各篇刊載內容。