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題 名 | 干涉式多層透明導電膜之重複性研究=Repeatability of Multilayer Transparent Conducting Films |
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作 者 | 鄭秉忠; 凌國基; 唐謙仁; 林政忠; | 書刊名 | 真空科技 |
卷 期 | 13:1 2000.03[民89.03] |
頁 次 | 頁20-24 |
分類號 | 448.5 |
關鍵詞 | 干涉式多層透明導電膜; 氧化銦錫; 平板顯示器; Indium tin oxide; ITO; |
語 文 | 中文(Chinese) |
中文摘要 | 由於平板顯示器尺寸及畫面品質的要求愈來愈高,所以愈來愈需要電阻更低的透明導電膜。但目前常用的透明導電材料:氧化銦錫(Indium Tin Oxide, ITO)本身為氧化物半導體,能降低的電阻範圍有限。本研究利用膜層的干源原理鍍製電阻較低的干涉式多層透明導電膜,利用直流及射頻濺射鍍膜方式試鍍樣品,並將同一個薄膜設計試鍍數個樣品證明其可重複性。 |
英文摘要 | Because of the demand on the size and the image of the flat panel display, there is a need for transparent conducting films with a lower resistance. The transparent conducting film that is presently used in industry in Indium Tin Oxide (ITO). Because ITO is a semiconductor oxide, the possibility of lowering its resistance is limited, in this research the interference effect between ITO layers and silver layers is used when designing multiplayer transparent conducting films. A two targets sputtering system with DC and RF power supplies is used for making samples and also for showing the reproducibility of the edsigns. |
本系統中英文摘要資訊取自各篇刊載內容。