頁籤選單縮合
題 名 | Preparation and Lithographic Performance of Novel Copolymers Having Acid Labile Pendant Alicyclic Ether Moieties |
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作 者 | Liu,Jui-hsiang; Shih,Jen-chieh; | 書刊名 | Journal of Polymer Research |
卷 期 | 8:2 2001.06[民90.06] |
頁 次 | 頁143-150 |
分類號 | 467 |
關鍵詞 | Photoacid generator; Chemical amplified reaction; Photoresist; Alicyclic ether; Acid labile groups; Acid catalized dehydration; |
語 文 | 英文(English) |