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題 名 | 離子束沈積含氮類鑽碳膜之結構與光學性質=Structural and Optical Properties of Nitrogen-containing Diamond-like Carbon Films Deposited by Ion Beam Process |
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作 者 | 詹德均; | 書刊名 | 真空科技 |
卷 期 | 14:1 2001.04[民90.04] |
頁 次 | 頁34-40 |
分類號 | 440.34 |
關鍵詞 | 含氮類鑽碳膜; 離子束法; Nitrogen-containing diamond-like carbon; DLC; |
語 文 | 中文(Chinese) |
中文摘要 | 利用離子束法沈積類鑽碳膜和含氮類鑽碳膜,並且有系統地研究氮氣流量變化對類鑽碳膜的結構和光學性質的影響。類鑽碳膜的化學結構和組成係以二次離子質譜儀(SIMS)、拉曼光譜和霍氏紅外光譜(FTIR)來分析,而薄膜的光學性質則是以薄膜量測儀利用反射光譜法量測薄膜厚度與光學常數。SIMS的分析結果顯示氮原子是均勻的分佈在薄膜裡面,紅外穿透光譜和拉曼光譜証明類鑽碳膜中石墨化結構特性,而含氮類鑽碳膜較高的消光係數顯示氮的摻雜會降低薄膜的透光度。附著性試驗的結果証明本研究方法可以直接將含氮類鑽碳膜堅固地沈積在不�袗�上,克服了其他方法為了增加附著力,必須在薄膜與基材之間添加中間層的問題。 |
英文摘要 | Nitrogen-containing diamond-like carbon (DLC) films and diamond-like carbon films were deposited using ion beam technique. The structural and optical properties of DLC films have been systematically studied as a function of the nitrogen flow. Secondary Ion Mass Spectrometry (SIMS), Raman spectroscopy, and Fourier transform infrared spectroscopy (FTIR) characterized the chemical structure and elemental composition of the DLC films. The optical properties of the films were evaluated using thin film metrology system with reflectance spectra. The SIMS analyses show that the nitrogen atoms are uniform throughout the film. The IR transmission and Raman spectra demonstrate that the graphitic characterization in DLC films. The higher extinction coefficient of the nitrogen-containing DLC film indicates that the nitrogen incorporation can lower the transparency of the films. The results of adhesion tests show that the nitrogen-containing DLC films have been firmly deposited on stainless steel without an intermediate layer which is commonly used for other coating processes as a buffer layer to improve adhesion strength. |
本系統中英文摘要資訊取自各篇刊載內容。