頁籤選單縮合
題 名 | Syntheses and Characterization of Organoimido Complexes of Niobium (Ⅴ): Potential CVD Precursors |
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作 者 | 裘性天; 林志成; 莊琇惠; 李錦祥; 彭旭明; | 書刊名 | Journal of the Chinese Chemical Society |
卷 期 | 45:3 1998.06[民87.06] |
頁 次 | 頁355-360 |
分類號 | 340 |
關鍵詞 | Niobium complex; Organoimido ligands; CVD; Precursors; |
語 文 | 英文(English) |
英文摘要 | New niobium imido complexes (RN) Nb (NEt□) □(R=Pr□, Pr□ and Bu□), potential precursors to grow niobium containing thin ilms by chemical vapor deposition (CVD) were prepared by reacting the corresponding (RN) NbCl□py□ complexes (R=Pr□, Pr□ and Bu□; py=pyridine) with LiNEt□ in hydrocarbon solvents. The structures of (RN) NbCl□py□ (R=Pr□ and Bu□), determined by X-ray crystallography, are mononuclear with distorted octahedral geometries. For each complex, three chloride ligands are cis to the imido ligand. For (Pr□N) NbCl□py□, the Nb=NPr□ bond distance (A) is 1.733 (3) and the <Nb=N-Pr□ angle (□) is 17.80(3). Crysal data: monoclinic, space group P2□/n, a=8.805 (2), b=14.930 (4), c=13.407 (3)□, β=93.37 (2)°, V=759.5 (7) □□, Z=4, D□=1.565 g cm□. For (Bu□N) NbCl□py2, the Nb=NBu□ bond distance (A) is 1.734 (4) and the <Nb=N-Bu□ angle ( ) is 174.8(4). Crystal data: monoclinic, space group P2□/c, a=9.609(1), b=13.591(6), c=14.615(2) □, β=90.05(1)°, V=1908.5(9) □□, Z=4, D□=1.492 g cm□. |
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