頁籤選單縮合
題名 | Diamond-Like Hydrocarbon Films Made by Using Planar Magnetron RF-Sputtering=以輻射頻濺鍍法製造及分析類鑽石含氫碳膜 |
---|---|
作者 | 李玉華; 劉家呈; 吳修雲; |
期刊 | Proceedings of the National Science Council : Part A, Physical Science and Engineering |
出版日期 | 199411 |
卷期 | 18:6 1994.11[民83.11] |
頁次 | 頁531-537 |
分類號 | 472.16 |
語文 | eng |
關鍵詞 | Diamond-like; Hydrogenated diamond-like; Thin films; RF-sputtering; |