頁籤選單縮合
題名 | Wafer Fault Detection and Key Step Identification for Semiconductor Manufacturing Using Principal Component Analysis, AdaBoost and Decision Tree= |
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作者 | Fan, Shu-kai S.; Lin, Shou-chih; Tsai, Pei-fang; Lin, Shou-chih; Tsai, Pei-fang; Fan, Shu-kai S.; |
期刊 | 工業工程學刊 |
出版日期 | 20160400 |
卷期 | 33:3 2016.04[民105.04] |
頁次 | 頁151-168 |
分類號 | 448.552 |
語文 | eng |
關鍵詞 | Fault detection; FD; AdaBoost; Semiconductor manufacturing; Key step identification; |