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題名 | 全像光子晶體與資訊儲存技術(I)--製作光子晶體結構之簡緻全像蝕刻系統=Compact Holographic Lithography System for Photonic-crystal Structure |
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作者 | 謝美莉; 蘇于傑; 林予應; 莊淑芳; 林尚佑; Hsieh, Mei-li; Su, Yu-jie; Lin, Yu-ying; Chuang, Shu-fang; Lin, Shawn-yu; |
期刊 | 光學工程 |
出版日期 | 20121200 |
卷期 | 120 2012.12[民101.12] |
頁次 | 頁19-27 |
分類號 | 448.552 |
語文 | chi |
關鍵詞 | 二維光子晶體; 全像蝕刻系統; Two-dimentional photonic-crystal; Holographic lithography; |
中文摘要 | 本文中我們介紹了一個簡緻全像蝕刻系統,用來製作多種二維光子晶體結構。在此光學系統裡,透過良好地整合控制多道光的光圈、稜鏡和偏振片,使得系統非常穩定且值得信賴。形成干涉圖形的多道光的光程也被設計為等長,因此可產生高對比的干涉條紋,以製作出高品質的光子晶體結構。在這篇文章裡,我們討論光學系統裡的各項光學參數對形成的不同晶格週期和晶格對稱性之影響。 |
英文摘要 | We report the design and a successful implementation of a compact holographic lithography system for fabricating a variety of 2D photonic-crystal structures. In our optical system, apertures, prisms and polarizers for multi-beam control are well integrated, leading to a stable and reliable system. The path lengths of the multiple beams which form the interference pattern are set to be the same. Consequently, our setup can generate a high contrast interference pattern and, hence, a high quality photoresist exposure of photonic crystals. In this paper, the desirable parameters of our optical system will be discussed. Photonic-crystal templates with different lattice periods and lattice symmetries recorded in the photoresist will also be illustrated. |
本系統之摘要資訊系依該期刊論文摘要之資訊為主。