頁籤選單縮合
題名 | A Study of the Microstructure, Texture and Sputtering Properties of 5N High-purity Aluminum Target= |
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作者 | Hong, In-ting; Chiu, Chun-hao; Huang, Hung-shang; Hsieh, Rong-iuan; |
期刊 | China Steel Technical Report |
出版日期 | 20111200 |
卷期 | 24 2011.12[民100.12] |
頁次 | 頁56-63 |
分類號 | 472.5 |
語文 | eng |
關鍵詞 | 5N aluminum target; Sputtering rate; Texture; Hillock; |