頁籤選單縮合
題 名 | The Development of an 8×8 Optical Switch |
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作 者 | Yang, Yao-joe; Liao, Bo-ting; Shih, Sun-chih; Fan, Kuang-chao; | 書刊名 | 中國工程學刊 |
卷 期 | 33:1 2010.01[民99.01] |
頁 次 | 頁37-43 |
分類號 | 448.59 |
關鍵詞 | Optical microelectromechanical systems; Optical switches; Anisotropic silicon etching; Bi-stable; |
語 文 | 英文(English) |
英文摘要 | Abstract In this paper, a novel 8×8 optical switch, which consists of a MEMS-based silicon micro-mirror array and a solenoid-based bi-stable mini-actuator array, is presented. The silicon micro-mirror array is realized by using a single-step anisotropic silicon etching process. The silicon anisotropic etching technique is capable of fabricating the self-aligned micro-mirror array with high accuracy and high fabrication yield. The mini-actuator array comprises 64 electromagnetic solenoid-based bi-stable actuators integrated with pushing arms. Each micro-mirror, which is connected to substrate by a cantilever, can be individually actuated by a mini-actuator. Because of the bi-stability of the mini-actuators, the power consumption of the system can be significantly reduced. When the pushing arm does not contact the cantilever, the micro-mirror which is under zero external force can precisely reflect optical signals. When the pushing arm pushes up the micro-mirror, the optical signal will pass through under the mirror. The main advantages of this proposed switch include high precision, high fabrication yield, low actuation voltage, low cost, low power consumption, and easy fiber alignment. The optical performance and the dynamic response of the switch are also investigated. The measured insertion loss is about -2.2 ~ -3.3dB, cross-talk is less than -60dB, and the measured switching time is less than 12ms. |
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