頁籤選單縮合
題 名 | Fabrication and Measurement of a 1 × 2 Optical Switch with Fiber-Switching Design |
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作 者 | Yang, Yao-joe; Kuo, Wen-cheng; | 書刊名 | 淡江理工學刊 |
卷 期 | 10:2 2007.06[民96.06] |
頁 次 | 頁121-126 |
分類號 | 446 |
關鍵詞 | Optical fiber switch; SOI wafer; Comb-drive; Stopper; ICP-RIE; |
語 文 | 英文(English) |
英文摘要 | In this work, the method of a dual-thickness SOI process is applied to fabricate a 1×2 optical switch which employs fiber-switching mechanism. The switch includes comb-drive actuators, older beams suspensions and fiber holders. A novel SOI process which can create suspended micro structures with two different thicknesses is also introduced to fabricate the device. The actuators of the switch move the input fiber from one channel to the other with an input voltage of 100 Volts. Experimental results are provided and transient behaviors are also measured. 0.92 dB and 0.89 dB are the measured average insertion losses in the two output channels. The typical switching time is about 3.5ms. |
本系統中英文摘要資訊取自各篇刊載內容。