頁籤選單縮合
題 名 | Investigation of Flow and Heat Transfer in Vertical CVD Reactors=垂直式CVD反應器內流場與熱傳研究 |
---|---|
作 者 | 崔燕勇; 陳建宏; | 書刊名 | Proceedings of the National Science Council : Part A, Physical Science and Engineering |
卷 期 | 22:1 1998.01[民87.01] |
頁 次 | 頁154-162 |
分類號 | 446.1 |
關鍵詞 | 垂直式CVD反應器; 熱傳研究; Vertical CVD reactor flow; Numerical simulation; Chemical vapor deposition; |
語 文 | 英文(English) |
中文摘要 | 本研究係以數值方法探討大尺寸垂直式化學氣相沉積反應器內的流場。描述流場 傳輸現象的統御方程式被建構在軸對稱非正交曲線座標上,利用有限體積法將方程式離散化 ,計算網路係安排成非交錯形式,為避免非交錯網格所造成之速度與壓力相互不耦合的現象 ,網格面上的速度計算要加以特別處理。結果顯示當晶座加熱到夠高的溫度,流場受到浮力 的影響在晶座上方產生迴流,此造成晶座上熱傳遞量的減弱及不均勻的熱通量。藉由旋轉晶 座可以抑制迴流的產生,但是卻又會在晶座外緣產生和浮力驅動迴流方向相反的另一種型式 迴流。因為浮力和離心力的大小正比於爐內壓力的平方值,所以降低反應器的操作壓力是消 除這兩種迴流的有效方法。另外結果也顯示在某一特定的晶座溫度和轉速範圍內,可能存在 多重解,此顯示 CVD 反應器內的流場可蚍和操作的起始程序有關。 |
英文摘要 | This study is concerned with a numerical method to study the flow in large-size vertical chemical vapor deposition (CVD) reactors. The governing equations that describe the transport phenomena in the reactors are constructed in axisymmetric, curvilinear coordinates to fit an irregular geometry. Discretization is carried out using a finite=volume method. Since grids are arranged in a nonstaggered manner, special treatments are undertaken for calculation of face velocities such that decoupling between the velopcity and pressure is avoided. The calculation shows that te buoyancy force resulting from the heated susceptor may cause recirculating flow above the susceptor when the temperature is high enough, leading to reduction of heat transfer and nonuniform distribution of heat flux. The recirculation can be suppressed by rotating the susceptor. However, a different kind of recirculation, rotating in the direction opposite to the buoyancydriven recirculation, may be formed at the outer edge of the susceptor. An effective way to remove these recirculating flows is to reduce the reactor pressure because the buoyancy force and centrifugal force are proportional to the square of the reactor pressure. It is also shown that multiple-flow solutions may exist in certain temperature and rotational speed ranges Thus, the flow in the reactor may depend on the startup procedure. |
本系統中英文摘要資訊取自各篇刊載內容。