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題 名 | The Characterization and Fabrication of Pyroelectric Infrared Sensor |
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作 者 | Chang, C. C.; Chu, K. P.; Lai, Y. C.; | 書刊名 | 淡江理工學刊 |
卷 期 | 8:3 民94.09 |
頁 次 | 頁203-206 |
分類號 | 448.57 |
關鍵詞 | Pb[p0b0]Ca[90b1]TiO₃(PCT(30)); Remanent polarization; Coercive electric field; Pyroelectric coefficient; Voltage response; Specific detectivity; |
語 文 | 英文(English) |
英文摘要 | The pyroelectric infrared (PIR) sensor wit a calcium-modified lead titanate Pb1-xCaxTiO3 thin film with x=0.3 [PCT(30)] thin film have been successfully fabricated. A FR planar magnetron sputter was used to deposit PCT(30) thin film. A perovskite thin film can be obtained. From the properties measurement we can obtain the remanent polarization Pr=25.3μc/cm2 and coercive electric field Ec=52.65 KV/cm. The pyroelectric coefficient was measured as a function of temperature which was 4.13×10-4 C/m2 K at 300 degree C. For the PIR performances measurement, the voltage response of the single PIR sensor is 723.5VW-1 and the specific detectivity is 8.28×106 cmW-1 at 0.3 Hz. In addition, a 2-D 8×8 element PIR sensor array is finished with fabricated PIR sensors. |
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