頁籤選單縮合
題名 | An AFM Probe Controller Design Based on μ-Synthesis |
---|---|
作者 | Lan, Kuo-jung; Yen, Jia-yush; Lee, Chih-kung; Lin, Yi-ming; Chen, Cheng-hung; | 書刊名 | Asian Journal of Control |
卷期 | 7:1 民94.03 |
頁次 | 頁12-19 |
分類號 | 471.7 |
關鍵詞 | Atomic force microscope; Multiplicative uncertainty; μ-synthesis; PID control; |
語文 | 英文(English) |
英文摘要 | The atomic force microscope (AFM) is one of the most important tools for measuring atomic resolution. The AFM system maintains constant force between a tip and the sample in order to tack the sample topography. The controller that maintains the constant interaction force plays a significant role in measurement accuracy. This paper presents aμ-synthesis controller design to deal with model uncertainty and establish a measurement error bound. The system's nonlinearity and the set-point drift are lumped into a multiplicative uncertainty. The performance bound allows specification of the error magnitude over the frequency range. Simulation results show that the proposed control can tolerate uncertainties. The spectrum from the experiments shows consistency with the design specifications. Images were taken to compareμ-synthesis control with a well-tuned PID control at a 480μm/s scan rate. The results verify the outstanding performance of the μ-controller. |
本系統之摘要資訊系依該期刊論文摘要之資訊為主。