頁籤選單縮合
題名 | Modeling of a Piezo-Actuated Positioning Stage Based on a Hysteresis Observer |
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作者姓名(外文) | Lin, Chih-jer; Yang, Sheng-ren; | 書刊名 | Asian Journal of Control |
卷期 | 7:1 民94.03 |
頁次 | 頁73-80 |
分類號 | 448.942 |
關鍵詞 | Hysteresis modeling; Observer; Tracking; |
語文 | 英文(English) |
英文摘要 | Piezo-actuated positioning stages contain two parts: a Piezo Electric Actuator (PEA) and a positioning mechanism. The tracking control accuracy of the piezo-actuated positioning stage is limited due to the hysteretic nonlinearity of the PEA and the friction behavior of the positioning mechanism. This loss in precision restricts the use of the piezo-actuated stage in an ultra-high-precision optical system. This paper presents an inversion-based approach to reduce the nonlinearity of the PEA by using a proposed hysteresis observer. To reduce the degredation in precision due to the friction behavior of the positioning mechanism, a PI feedback controller with a feed-forward controller based on a hysteresis observer is proposed to solve tracking problems with modeling uncertainties and external disturbances. |
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