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題名 | AFM單懸臂探針之全像動態量測與最佳化分析=Full Field Measurement and Optimization of Atomic Force Microscope Single-beam Probes |
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作者姓名(中文) | 陳坤男; 籃天佑; | 書刊名 | 東南學報 |
卷期 | 27 2004.12[民93.12] |
頁次 | 頁103-112 |
分類號 | 471.713 |
關鍵詞 | 原子力顯微鏡探針; 全像式雷射顯微量測系統; 有限元素模型更新; 探針彈簧常數; Atomic force microscope probe; Holographic measurement system; Finite element model updating; Spring constant; |
語文 | 中文(Chinese) |
中文摘要 | 本文研究針對原子力顯微鏡(AFM)單懸臂探針,進行動態行為實驗與分析,以全像式雷射顯微量測系統,量測原子力顯微鏡探針之全域動態特性及其整體的運動模式。文中並採用ANSYS有限元素分析軟體,以電腦輔助模擬分析探針臂之自然頻率與模態振型,經由模擬和實驗相互比較驗證,並利用ANSYS之最佳化程序,進行單懸臂探針之有限元素模型更新,修改探針之結構尺寸、材料參數,使探針的有限元素模型之分析模態參數值趨近於實驗數據。最後,本文並以更新後之有限元素模型計算探針之彈簧常數。藉由本研究最佳化結果及所計算之彈簧常數,能提供探針研發設計之參考及提高探針使用上的效率。 |
英文摘要 | This research has focused on the experimental and computational studies of the dynamic behavior of single-beam cantilever probes used on atomic force microscopes. The finite element model updating of the cantilevers has also been investigated. A single-beam cantilever probe was first measured to extract their natural frequencies and mode shapes using the holographic micro-vibration measurement system. Then, finite element analyses were performed on the microstructure using the software package ANSYS and the results were correlated with the experiments. By calculating the frequency sensitivities with respect to geometrical or material properties of the probe, and minimizing the differences between the experimental and computational frequencies using this sensitivity information, the finite element model can be updated. Finally, the spring constant of the probe was also calculated using the updated finite element model. |
本系統之摘要資訊系依該期刊論文摘要之資訊為主。