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題名 | 16×2 Thermally Actuating and Sensing Probe Array |
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作者姓名(外文) | Tsai,Ching Hsiang; Liang,Chao Chiun; Hsieh,Gen Wen; Lin,Wei-chih; Lee,Yuh Wen; | 書刊名 | 淡江理工學刊 |
卷期 | 7:2 2004.06[民93.06] |
頁次 | 頁111-114 |
分類號 | 448.5 |
關鍵詞 | Scanning probe microscope; Thermal actuator integrated probe array; |
語文 | 英文(English) |
英文摘要 | This paper developed an active scanning probe array. The probe array consists of 16×2 probes thermally actuating and sensing. The 32 probes are integrated with Ti/Pt temperature sensors and bimorph thermal actuators. Each probe is a Si3N4 cantilever equipped with a sharp nano scale pyramid tip at its freed end. When one of the probes is actuated, its neighboring probes can provide temperature sensing feedback. The temperature coefficient of resistance (TCR) of the embedded Ti/Pt sensor of each probe is 2100 ppm℃-1, and the micro thermal actuator shows good reliability after 500 cycles over specification continuous actuating test. |
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