頁籤選單縮合
題 名 | Fabrication of Field Emitters and Its Application to Flat Panel Display |
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作 者 | 李憲中; | 書刊名 | 華夏學報 |
卷 期 | 32 1997.10[民86.10] |
頁 次 | 頁13289-13315 |
分類號 | 448.5 |
關鍵詞 | Field-emission; Emitter array; Flat panel display; |
語 文 | 英文(English) |
英文摘要 | Due to the potential advantages of using field-emission cathodes as electron sources, a renewed interest in advanced IC technology utilizing silicon-based cold cathode microelectronics is emerging. However, some etching results concerning the emitter formation are still unknown, This paper present a study of emitter formation by various wet and dry etching methods. Some geometrical models are given for the analysis of anisotropic etching results. The emission feature from different emitter array is also given for comparison. Through the understanding of the emission characteristics from various emitter array, a novel design for Field-Emission Flat Panel Display is propsoed. |
本系統中英文摘要資訊取自各篇刊載內容。